Filtration Solutions for Microelectronics

Reducing Airborne Molecular Contamination (AMC)


Fine particulate and Airborne Molecular Contamination (AMC) need to be carefully controlled for high-yield, low-reject semiconductor manufacturing. 

Sources of AMC include: 

  • chemical off-gassing
  • exhaust fumes from other industries and processes
  • vehicle exhaust fumes
  • seasonal factors

AAF offers a wide range of filtration solutions starting with pre-filters and fine filters through HEPA and ULPA filters to AMC filters. In addition, AAF offers a wide range of filter housings. In this way cleanroom classes with highest requirements can be achieved.

Failures due to AMC are classified as:

  • Mechanical effects, including obstruction of cooling airflow, interference of moving or optical parts and deformation of surfaces.
  • Chemical effects include corrosion of electrical components, due to dust comprised of sulphur and chlorine bearing salts.
  • Electrical effects include impedance changes and electronic circuit conductor bridging.

 

Air filter solutions for the microelectronic industry

Filter Elements

Housings and Equipment

Air filter solutions for the microelectronic industry

Panel Filters

Our panel filters are ideal for protecting more expensive secondary air filters from premature dust loading and replacement. As primary filters, they also help reduce HVAC maintenance costs by preventing unnecessary dust build-up on coils, fans and duct work.

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Pocket Filters

Our pocket filters (DriPak SX, NX and GX)  have the highest dust holding capacity, with optimised pressure drop behaviour for high performance.

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AstroSorb

Compact filter for the removal of airborne molecular contaminants (AMC) and for effective removal of typical gaseous contaminants that lead to unpleasant odors or corrosion

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Compact Filters

Our VariCel VXL and VariCel VXLE have higher dust holding capacity, which results in less filter changes. They have an extended service life, thus reducing replacement costs.

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MEGAcel I

Deep pleat box filter with separator and membrane technology offering ultra low pressure drop at HEPA filtration efficiency levels. Used to remarkably increase IAQ or for applications requiring ultra clean air. Suitable for DPC test method.

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AstroFan FFU

The AAF AstroFan FFU unit is a self-contained ceiling filter fan unit. The unit is lightweight and easy to install.

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AstroSorb

Compact filter for the removal of airborne molecular contaminants (AMC) and for effective removal of typical gaseous contaminants that lead to unpleasant odors or corrosion

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AstroHood II

Compact filter for the removal of airborne molecular contaminants (AMC) and for effective removal of typical gaseous contaminants that lead to unpleasant odors or corrosion

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MEGAcel II ME

Panel filter with membrane technology offering ultra low pressure drop up to ULPA filtration efficiency levels. Mainly used in ultra clean environments and applications such as cleanrooms. Suitable for DPC test methods.

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Pocket Filters

Our pocket filters (DriPak SX, NX and GX)  have the highest dust holding capacity, with optimised pressure drop behaviour for high performance.

Click here to learn more

AstroSorb

Compact filter for the removal of airborne molecular contaminants (AMC) and for effective removal of typical gaseous contaminants that lead to unpleasant odors or corrosion

Click here to learn more

Compact Filters

Our VariCel VXL and VariCel VXLE have higher dust holding capacity, which results in less filter changes. They have an extended service life, thus reducing replacement costs.

Click here to learn more

MEGAcel II ME

Panel filter with membrane technology offering ultra low pressure drop up to ULPA filtration efficiency levels. Mainly used in ultra clean environments and applications such as cleanrooms. Suitable for DPC test methods.

Click here to learn more

AAF International engineers are active in standardisation committees in both the United States and Europe. We play an important role in establishing new standards and recommending practices for cleanroom applications.

As an example, our engineers were key contributors in developing and writing the Institute of Environmental Sciences and Technology Recommended Practices. This professional competence is reflected in the design, manufacture, and testing of each cleanroom filtration solution we produce.

The result is cleanroom filters engineered and assembled to give you the particulate removal you require, while delivering energy efficiencies and savings to your bottom line.

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